Prdouct Category

Feedthrought > Magnetic Fluid Unit

Overview

The ferro-magnetic fluid feedthrough is a high quality, precision engineered device. Each unit is statically and dynamically tested for vacuum integrity, pressure capacity and conformance to mechanical specifications, as part of our continuing quality assurance program.
The ferro-magnetic fluid feedthrough offers unique capabilities in the transmission of mechanical power into a chamber. It operates by trapping a low vapor pressure magnetic fluid in small annular gaps of intense magnetic fields. A pressure differential can be maintained across each stage of trapped ferro-magnetic fluid under both static and dynamic conditions, thus creating a unique zero leakage rotary seal. There are no mechanical contact points other than the bearings, so there is nothing which will wear or require maintenance.
The ferro-magnetic fluid in this unit is designed for high vacuum service (10-8 torr). There is a wide range of ferro-magnetic fluids available for unusual service conditions.
The ferro-magnetic fluid seal uses the response of a magnetic fluid to an externally applied magnetic field. The seal has a permanent magnet, two pole pieces, a magnetically permeable, multi-staged shaft, and the ferro-magnetic fluid (see drawing). The magnetic field, completed by pole pieces and shaft, oncentrates the magnetic flux at the smallest radial gaps. There, the ferro-magnetic fluid forms a series of liquid O-rings with gas-filled intervening regions. Each stage can typically sustain a differential pressure of 0.2 bar (155 torr) while acting in series with other stages. Individual seals, therefore, can withstand atmospheric pressure differential. These non-contaminating, highly reliable, nearly maintenance-free feedthroughs have a leak rate of less than 1 x 10-11 std cc/sec He and require no lubrication. They withstand process operation without degrading, even in demanding environments.

Applications:

  • Rotary stag
  • Barrels
  • Platens
  • Planetaries
  • Web coater rollers used in thin film deposition and etching processes
  • Specifications Table

020.jpg

   Solid Shaft Rotary Feedthroughs (CF flanged)

PartNo

Mounting

Max. Torque

Max. No-Load
Spin Speed

Water Cooling
(locations)

Shaft O.D.

Bearings
(type/material)

FE103532

2.75" CF

15 lb.-in (1.69 Nm)

10,000 rpm

No

0.25" (6.35mm)

R4/SS

FE103915

1.33" CF

15 lb.-in (1.69 Nm)

10,000 rpm

No

0.25" (6.35mm)

R4/SS

FE121060

2.75" CF

67 lb.-in (7.57 Nm)

10,000 rpm

No

0.375" (9.5mm)

6800/SS

FE103909

2.75" CF

180 lb.-in (20.34 Nm)

10,000 rpm

No

0.50" (12.7mm)

R8/SS

FE103501

2.75" CF

15 lb.-in (1.69 Nm)

10,000 rpm

Yes (1.14", 1.87")

0.25" (6.35mm)

R4/SS

FE103912

2.75" CF

67 lb.-in (7.57 Nm)

10,000 rpm

Yes (1.07", 1.24")

0.375" (9.5mm)

R6/SS

FE121099

2.75" CF

67 lb.-in (7.57 Nm)

10,000 rpm

Yes (0.75")

0.375" (9.5mm)

6800/SS

FE103154

2.75" CF

60 lb.-in (6.78 Nm)

10,000 rpm

No

0.375" (9.5mm)

Radial/SS

Shaft Rotary Feedthroughs (O-Ring flanged)
021.jpg


PartNo

Mounting

Max. Torque

Max. No-Load
Spin Speed

Water Cooling
(locations)

Shaft O.D.

Bearings
(type/material)

Face Seal
O-Ring

FE103244

6.00" Flange

180 lb.-in 
(20.34 Nm)

10,000 rpm

No

0.50" (12.7mm)

R8/SS

O-V234

FE103904

5.00" Flange

2,484 lb.-in 
(281 Nm)

3,000 rpm

Yes (1.58", 1.54")

0.75" (19mm)

7305/BS

O-V337

FE103328

7.00" Flange

12,445 lb.-in 
(1,406 Nm)

2,870 rpm

Yes (2.25", 1.5")

1.687" (42.85mm)

Ang. Cont/BS

O-V351

FE104259

6.00" Flange

2,592 lb.-in 
(293 Nm)

4,840 rpm

Yes (1.72", 1.54")

1.00" (25.4mm)

Ang. Cont/BS

O-V340

FE103246

6.00" Flange

670 lb.-in 
(75.7 Nm)

8,100 rpm

No

0.75" (19mm)

R12/SS

O-V234

FE103182

6.00" Flange

180 lb.-in 
(20.34 Nm)

10,000 rpm

Yes (0.5", 1.74")

0.50" (12.7mm)

R8/SS

O-V234

FE103329

7.00" Flange

9,835 lb.-in 
(1,111 Nm)

2,870 rpm

Yes (2.25", 1.5")

0.50" (12.7mm)

Ang. Cont/BS

O-V351

Solid Shaft Rotary Feedthroughs (Baseplate)
022.jpg

PartNo

Mounting

Max. Torque

Max. No-Load
Spin Speed

Shaft O.D.

Bearings
(type/material)

Face Seal
O-Ring

FE103236

3/4" BP

15 lb.-in 
(1.69Nm)

10,000 rpm

0.25" (6.35mm)

R4/SS

O-V026

FE103237

1" BP

15 lb.-in 
(1.69Nm)

10,000 rpm

0.25" (6.35mm)

R4/S, S

O-V026

FE103982

1" BP

15 lb.-in 
(1.69Nm)

10,000 rpm

0.25" (6.35mm)

R4/SS

O-V215

FE108664

1" BP

67 lb.-in 
(7.57Nm)

10,000 rpm

0.375" (9.5mm)

R6/SS
R620/SS

O-V026

FE103990

1" BP

67 lb.-in 
(7.57Nm)

10,000 rpm

0.375" (9.5mm)

R6/SS

O-V026

FE121132*

1" BP

67 lb.-in 
(7.57Nm)

10,000 rpm

0.375" (9.5mm)

6800/SS

O-V026

FE103991

1.5" BP

67 lb.-in 
(7.57Nm)

10,000 rpm

0.375" (9.5mm)

R6/SS

O-V132

FE107519

1" BP

15 lb.-in 
(1.69Nm)

10,000 rpm

0.25" (6.35mm)

R4/SS

O-V026

FE103979

1.5" BP

12 lb.-in 
(1.36Nm)

10,000 rpm

0.25" (6.35mm)

Radial/SS

O-V132

FE104445

1" BP

12 lb.-in 
(1.36Nm)

10,000 rpm

0.25" (6.35mm)

Radial/SS

O-V026

Solid Shaft Rotary Feedthroughs (Thread mount)
023.jpg

PartNo

Mounting

Max. Torque

Max. No-Load
Spin Speed

Water Cooling
(locations)

Shaft O.D.

Bearings
(type/material)

Face Seal
O-Ring

FE103971

5/16-24 UNF-2A Thread

10 lb.-in 
(1.13 Nm)

10,000 rpm

No

0.1875" (4.76mm)

R166/SS

O-V012

FE103978

7/16-20 UNF-2A Thread

16 lb.-in 
(1.81 Nm)

10,000 rpm

No

0.25" (6.35mm)

R4/SS

O-V015

FE103191

1-14 UNF-2A Thread *

180 lb.-in 
(20.34 Nm)

10,000 rpm

No

0.50" (12.7mm)

R8/SS

, O-V128

FE103204

1-14 UNF-2A Thread *

180 lb.-in 
(20.34 Nm)

10,000 rpm

0.89", 1.74"

0.50" (12.7mm)

R8/SS

O-V128

FE103193

1-14 UNF-2A Thread *

670 lb.-in 
(75.7 Nm)

8,100 rpm

No

0.75" (19mm)

R12/SS

O-V128

FE103206

1-14 UNF-2A Thread *

670 lb.-in 
(75.7 Nm)

8,100 rpm

0.89", 1.74"

0.75" (19mm)

R12/SS

O-V128

Hollow Shaft Rotary Feedthroughs (Cartridge mount)
024.jpg


PartNo

Mounting

Max. No-Load
Spin Speed

Shaft O.D.

Bearings
(type/material)

Outer
O-Ring

Inner
O-Ring

FE103319

Cartridge

8,000 rpm

Accepts 1.000"
(+0" / -0.002")

6906/BS

O-V037

O-V022

FE103320

Cartridge

6,500 rpm

Accepts 1.500"
(+0" / -0.002")

6909/BS

O-V041

O-V029

FE103321

Cartridge

5,500 rpm

Accepts 2.000"
(+0" / -0.002")

6911/BS

O-V153

O-V033

FE103322

Cartridge

1,375 rpm

Accepts 3.000"
(+0" / -0.002")

Radial/BS

O-V159

O-V151

FE103318

Cartridge

9,500 rpm

Accepts 0.500"
(+0" / -0.002")

6903/BS

O-V032

O-V014

 

 Hollow Shaft Rotary Feedthroughs (O-Ring flanged)
025.jpg


PartNo

Mounting

Max. No-Load
Spin Speed

Water Cooling
(locations)

Shaft O.D.

Bearings
(type/material)

Face Seal
O-Ring

FE103358

6.00" Flange

9,500 rpm

No

Accepts 0.500" 
(+0" / -0.002")

6903/BS

O-V238

FE105395

6.00" Flange

9,500 rpm

Yes (0.54", 1.15")

Accepts 0.500" 
(+0" / -0.002")

6903/BS

O-V238

FE103359

7.00" Flange

7,000 rpm

No

Accepts 1.000" 
(+0" / -0.002")

6906/BS

O-V244

FE105396

7.00" Flange

7,000 rpm

Yes (0.35", 1.36")

Accepts 1.000" 
(+0" / -0.002")

6906/BS

O-V244

FE105397

10.00" Flange

1,375 rpm

Yes (1.635", 1.29")

Accepts 3.000" 
(+0" / -0.002")

Radial/BS

O-V262

FE103354

7.00" Flange

6,500 rpm

Yes (0.55", 1.13")

Accepts 1.500" 
(+0" / -0.002")

6909/BS

O-V244

FE107428*

8.00" Flange

6,000 rpm

Yes (0.44", 1.28")

Accepts 1.500" 
(+0" / -0.002")

7012/BS

O-V256

FE103361

7.00" Flange

5,500 rpm

No

Accepts 2.000" 
(+0" / -0.002")

6911/BS

O-V244

FE103362

10.00" Flange

1,375 rpm

No

Accepts 3.000" 
(+0" / -0.002")

Radial/BS

O-V262

FE103921

7.00" Flange

5,500 rpm

Yes (0.62", 1.23")

Accepts 2.000" 
(+0" / -0.002")

6911/BS

O-V244

FE103360

7.00" Flange

2,800 rpm

No

Accepts 1.500" 
(+0" / -0.002")

Radial/BS

O-V244